Annealing effects on the structural and optical properties of growth ZnO thin films fabricated by pulsed laser deposition (PLD)

摘要

Annealed ZnO thin film at 300, 350, 400, 450 and 500 ℃ in air were deposited on glass substrate by using pulsed laser deposition. The effects of annealing temperature on the structural and optical properties of annealed ZnO thin films by grazing incident X-ray diffraction (GIXRD), transmittance spectra, and photolumi-nescence (PL) were investigated. The GIXRD reveal the presence of hexagonal wurtzite structure of ZnO with preferred orientation (002). The particle size is calculated using Debye-Scherrer equation and the average grain size were found to be in the range 5.22-10.61 ± 0.01 nm. The transmittance spectra demonstrate highly transparent nature of the films in visible region (＞70 %). The calculation of optical band gap energy is found to be in the range 2.95-3.32 ± 0.01 eV. The PL spectra shows that the amorphous film gives a UV emission only and the annealed films produce UV, violet, blue and green emissions this indicates that the point defects increased as the amorphous film was annealed.