APPARATUS AND METHOD FOR MANUFACTURING HIGH TEMPERATURE SUPER-CONDUCTING THIN FILM USING PULSED LASER DEPOSITION(PLD) PROCESS

摘要

PURPOSE: An apparatus and method for manufacturing a high temperature super-conducting thin film using a PLD(Pulsed Laser Deposition) process are provided to be capable of uniformly forming the thin film. CONSTITUTION: An apparatus for manufacturing a high temperature super-conducting thin film using a PLD process is provided with a vacuum chamber(23) for loading a substrate(26), a light source(21) for irradiating laser beam to a target, and an optical system(22) for transmitting the laser beam to the target by changing light path. The apparatus further includes a target driving part(25) for rotating the target and simultaneously moving the target to and fro. The optical system includes a plurality of mirrors and an attenuator.