Low-leakage current and high-breakdown voltage GaN-on-Si (111) System with an AlGaN impurity blocking layer

摘要

The influence of different AlGaN Impurity Blocking Layer (IBL) thickness in the GaN/Si (111) structure with GaN/AlN SLs buffer on the material and electrical properties of GaN/Si (111) system was studied in detail. It is found that the insertion of AlGaN IBL can increase the (102) FWHM and decrease the (002) FWHM. Meanwhile, AlGaN IBL with an optimized thickness can further improve the surface roughness and strain-state of GaN-Si (111) system. By using Secondary Ion Mass Spectroscopy, it is found that AlGaN IBL have a strong effect in blocking the Si donor impurities originating from the Si substrate during the high temperature growth, which can decrease the leakage current while the breakdown voltage can be dramatically increased.