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Effect of etching time on morphological, optical and structural properties of silicon nanowire arrays etched on multi-crystalline silicon wafer

机译:刻蚀时间对刻蚀多晶硅晶片上硅纳米线阵列的形貌,光学和结构性能的影响

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摘要

In this work we report a rapid, cost effective and easy approach to prepare an antireflective surface by using silver assisted chemical etching method to form silicon nanowire arrays on multicrystalline silicon (mc-Si) wafer. We present a correlation between morphological, optical and structural properties of the obtained nanostructured mc-Si. We found that the length of silicon nanowires increases with increasing etching time. Beyond 30 min the wires are broken. This behavior is due to the existence of defects in multicrystalline silicon which facilitate the etching of the nanowires. AFM and SEM show the change of the morphology of the samples before and after the chemical etching. We investigate that the reflectivity of the nanowires etched for 30 min decreases to less than 3% which is beneficial for solar light trapping. Furthermore, we explore the role of etching time in the enhancement of Raman signal. We deduce that etching time plays a key role on the morphological, optical and structural properties of silicon nanowires.
机译:在这项工作中,我们报告了一种快速,经济高效且容易的方法,该方法通过使用银辅助化学刻蚀方法在多晶硅(mc-Si)晶圆上形成硅纳米线阵列来制备抗反射表面。我们提出了所获得的纳米结构的mc-Si的形态,光学和结构特性之间的相关性。我们发现硅纳米线的长度随着蚀刻时间的增加而增加。 30分钟后电线断开。此行为归因于多晶硅中存在缺陷,这些缺陷有助于刻蚀纳米线。原子力显微镜和扫描电镜显示了化学刻蚀前后样品的形貌变化。我们调查了蚀刻30分钟的纳米线的反射率降低到小于3%,这对于捕获太阳光很有帮助。此外,我们探索蚀刻时间在拉曼信号增强中的作用。我们推断蚀刻时间对硅纳米线的形态,光学和结构特性起着关键作用。

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  • 来源
    《Journal of materials science》 |2017年第6期|4807-4813|共7页
  • 作者单位

    Laboratory of Semi-Conductors, Nano-Structures and Advanced Technologies, Research and Technology Centre of Energy, Borj-Cedria Science and Technology Park, BP 95, 2050 Hammam-Lif, Tunisia,Faculty of Science of Bizerte, University of Carthage, 7021 Zarzouna, Tunisia;

    Laboratory of Semi-Conductors, Nano-Structures and Advanced Technologies, Research and Technology Centre of Energy, Borj-Cedria Science and Technology Park, BP 95, 2050 Hammam-Lif, Tunisia,Faculty of Science of Bizerte, University of Carthage, 7021 Zarzouna, Tunisia;

    LPV, Research and Technology Center of Energy, BP 95, 2050 Hammam-Lif, Tunisia;

    Laboratory of Semi-Conductors, Nano-Structures and Advanced Technologies, Research and Technology Centre of Energy, Borj-Cedria Science and Technology Park, BP 95, 2050 Hammam-Lif, Tunisia;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
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