Ti-doped indium gallium oxide electrolyte-insulator-semiconductor membranes for multiple ions and solutes detectors

摘要

Detecting multiple ions and solutes in human body is important to medical examinations of patients. In this study, Ti-doped InGaO (IGO) electrolyte-insulator-semiconductor (EIS) biosensors were fabricated for multiple ion and solute sensing capability. To optimize the sensing performance, rapid thermal annealing could enhance up to 70% hydrogen ion sensitivity and more than 50% multiple ion and solute sensitivity compared with the as-deposited sample owing to improvement of material quality. Ti-doped IGO EIS multianalyte biosensors show promise for future portable biosensing applications.