Investigating polysilicon thin film structural changes during rapid thermal annealing of a thin film crystalline silicon on glass solar cell

摘要

Structural changes resulting from rapid thermal annealing were investigated in a thin film crystalline silicon on textured glass solar cell, in particular grain parameters and film modulus. Electron backscatter diffraction showed no significant change in grain dimensions post annealing and no preferred orientation. Columnar grains with large defect densities were visible in transmission electron microscopy with no qualitative change visible post annealing. A similar modulus obtained by nanoindenation, both pre and post annealing suggests no quantitative structural change. The film structure appears unchanged by rapid thermal annealing.