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首页> 外文期刊>Journal of Materials Research >Microstructures of La_1-xA_x(A = Ca or Sr)MnO_3-δthin films by liquid-delivery metalorganic chemical vapor deposition
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Microstructures of La_1-xA_x(A = Ca or Sr)MnO_3-δthin films by liquid-delivery metalorganic chemical vapor deposition

机译:液态输送金属有机化学气相沉积La_1-xA_x(A = Ca或Sr)MnO_3-δ薄膜的微观结构

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摘要

The microstructures of La_1-xA_x(A = Ca or Sr)MnO_3-δthin films grown by liquid-delivery metalorganic chemical vapor deposition on(001)MgO and (110)_pseudo-cubic LaAlO_3 were studied by transmission electron microscopy. The La_1-xCa_xMnO_3-δthin films on large lattice mismatched MgO exhibited very defective Microstructures and consisted of two typical regions. The first region was close to the Film-substrate interface and had an epitaxial relationship to the substrate with many Differently oriented domains nucleated on the substrate surface. The second region Consisted of columnar grains with some degree of texture.
机译:通过透射电子显微镜研究了在(001)MgO和(110)_伪立方LaAlO_3上进行液体输送金属有机化学气相沉积所形成的La_1-xA_x(A = Ca或Sr)MnO_3-δ薄膜的微观结构。大晶格失配的MgO上的La_1-xCa_xMnO_3-δ薄膜表现出非常有缺陷的微观结构,由两个典型区域组成。第一区域靠近薄膜-基材界面,并且与基材具有外延关系,在基材表面上有许多不同取向的区域。第二区域由具有一定质地的柱状晶粒组成。

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