Combinatorial nanocalorimetry

摘要

The parallel nano-scanning calorimeter (PnSC) is a silicon-based micromachined device for calorimetric measurement of nanoscale materials in a high-throughput methodology. The device contains an array of nanocalorimeters. Each nanocalorimeter consists of a silicon nitride membrane and a tungsten heating element that also serves as a temperature gauge. The small mass of the individual nanocalorimeters enables measurements on samples as small as a few hundred nanograms at heating rates up to 10~4 K/s. The sensitivity of the device is demonstrated through the analysis of the melting transformation of a 25-nm indium film. To demonstrate the combinatorial capabilities, the device is used to analyze a Ni-Ti-Zr sample library. The as-deposited amorphous samples are crystallized by local heating in a process that lasts just tens of milliseconds. The martensite-austenite transformation in the Ni-Ti-Zr shape memory alloy system is analyzed and the dependence of transformation temperature and specific heat on composition is revealed.