Introduction

摘要

Plasma and ion-beam surface treatments by energetic particle bombardment enable a high degree of freedom and control of surface material chemistry and microstruc-ture. The development of plasma and ion-beam surface modification methods and tools has allowed the synthesis, modification and exploration of new technologically important materials. Plasma surface treatments together with low energy (< 5 keV) ion-beam processing of surfaces, thin films, and nanostructures result in new phases and metastable states that directly impact the chemical, physical, and morphological properties of the material. Thus, this field is highly relevant for new applications such as tribological, optical and biomedical coated surfaces.