Frequency characterization of thin soft magnetic material layers used in spiral inductors

摘要

The paper details the characterization of thin magnetic materials layers, particularly soft materials, with respect to their behaviour in frequency (from 10 MHz to 1 GHz). The proposed method is suitable for any soft but insulating magnetic material; Yttrium Iron Garnet (YIG) is used as an example. The principle is based on a comparison between simulations for different values of the permeability and measurement values versus frequency of planar inductor structures; an experimental validation is proposed as well. Thin magnetic material is first deposited on an alumina substrate using RF sputtering technique; a planar spiral winding of copper is then deposited on the magnetic material by the same technique. The effective permeability versus frequency is obtained by comparing two samples of spiral windings with and without magnetic material. Network analyser measurements on samples of various geometrical dimensions and of different thicknesses are necessary to determine the effective magnetic permeability; we have obtained a relative effective permeability of about 30 for seven turns spiral inductor of a 17 μm YIG film.