Development of functional sub-100 nm structures with 3D two-photon polymerization technique and optical methods for characterization

摘要

Investigations of two-photon polymerization (TPP) with sub-100 nm in the structuring resolutionnare presented by using photosensitive sol-gel material. The high photosensitivity of this materialnallows for TPP using a large variety in laser pulse durations covering a range between sub-10 fsnand u0002140 fs. In this study, the authors demonstrate TPP structuring to obtain sub-100 nm in resolutionnby different approaches, namely, by adding a cross-linker to the material and polymerizationnwith sub-10 fs short pulses. Additionally, a simulation and model based characterization methodnfor periodic sub-100 nm structures was implemented and applied in an experimental white lightninterference Fourier-Scatterometry setup.