Phonon Heat Conduction in Thin Films: Impacts of Thermal Boundary Resistance and Internal Heat Generation

摘要

The measured thermal resistance across a thin film deposited on a substrate often in- cludes the internal thermal resistance within the film and the thermal boundary resistance (TBR) across the film-substrate interface. These two resistances are frequently lumped and reported as an equivalent thermal conductivity of the film. Two fundamental ques- tions should be answered regarding the sue of this equivalent thermal conductivity. One is whether it leads to the correct temperature distribution inside the film. The other one is wherther it is applicable for thin films with internal heat generation.