Flow Structure and Heat Transfer in a Stagnation Flow CVD Reactor

摘要

An experimental study is undertaken to investigate the flow structure and heat transfer in a stagnation flow chemical vapor deposition (CVD) reactor at atmospheric pressure. It is critical to develop models that predict flow patterns in such a reactor to achieve uniform deposition across the substrate. Free convection can negatively affect the gas flow as cold inlet gas impinges on the heated substrate, leading to vortices and disturbances in the normal flow path. This experimental research will be used to understand the buoyancy-induced and momentum driven flow structure encountered in an impinging jet CVD reactor. Investigations are conducted for various operating and design parameters. A modified stagnation flow reactor is built where the height between the inlet and substrate is reduced when compared with a prototypical stagnation flow reactor. By operating such a reactor at certain Reynolds and Grashof numbers, it is feasible to sustain smooth and vortex free flow at atmospheric pressure. The modified stagnation flow reactor is compared with other stagnation flow geometries with either a varied inlet length or varied heights between the inlet and substrate. Comparisons are made to understand the impact of such geometric changes on the flow structure and the thermal boundary layer. In addition, heat transfer correlations are obtained for the substrate temperature. Overall, the results obtained provide guidelines for curbing the effects of buoyancy and for improving the flow field to obtain greater film uniformity when operating a stagnation flow CVD reactor at atmospheric pressure.