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Study of the Formation of Bubbles in Rigid Substrate-Flexible Substrate Bonding Using Anisotropic Conductive Films and the Bubble Effects on Anisotropic Conductive Film Joint Reliability

机译:各向异性导电膜在刚性基底-柔性基底键合中气泡的形成及其对各向异性导电膜接头可靠性的影响

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The formation of process-related bubbles that become entrapped inside the anisotropic conductive film (ACF) layer during bonding processes remains an issue. The formation of these bubbles is strongly influenced by the process variables, such as bonding pressure and bonding temperature. Therefore, bonding process variables of bonding temperature, bonding pressure, and type of flexible substrate (FS) were changed in order to investigate the effects of the changes as they concern the formation of bubbles. According to the results, the tendency toward bubble formation was closely related to these three factors. The bubble area increased as the bonding temperature increased. Moreover, the shape and tendency of bubbles coincided with temperature distribution in?the ACF layer. Two different types of FS, each with different surface roughnesses and energies, were used. The bubbles formed only on the FS with the larger roughness and lower surface energy. According to the results from a surface energy measurement of FS types using goniometry, a FS with a higher surface energy is favorable for a bubble-free assembly, as the higher surface energy provides better wettability. In addition, in order to investigate the effect of bubbles on the reliability of ACF joints, the pressure cooker test (PCT) was performed, and all samples with bubbles electrically failed after 72 h of a PCT, as the process-related bubbles provided a moisture penetration path and entrapment site for moisture. However, all type 1 test vehicles (TVs) survived even after 120 h of a PCT. Therefore, Ar and O2 plasma treatments were performed on the FS with the lower surface energy in order to improve the surface energies and wettability. Following this, the bubbles were successfully removed at rigid substrate (RS)–FS bonding joints using ACFs.
机译:在粘合过程中形成与过程有关的气泡并在各向异性导电膜(ACF)层内部截留仍然是一个问题。这些气泡的形成受工艺变量(例如,粘合压力和粘合温度)的影响很大。因此,为了研究与气泡的形成有关的变化的影响,改变了粘合温度,粘合压力和柔性基板(FS)的类型的粘合工艺变量。根据结果​​,气泡形成的趋势与这三个因素密切相关。气泡面积随着粘合温度的升高而增加。此外,气泡的形状和趋势与ACF层中的温度分布一致。使用了两种不同类型的FS,每种FS具有不同的表面粗糙度和能量。仅在FS上形成的气泡具有较大的粗糙度和较低的表面能。根据使用测角法对FS类型的表面能进行测量的结果,具有较高表面能的FS对于无气泡组件是有利的,因为较高的表面能可提供更好的润湿性。此外,为了研究气泡对ACF接头可靠性的影响,进行了压力锅试验(PCT),并且所有带有气泡的样品在PCT均经过72小时后均发生了电失效,因为与过程相关的气泡提供了水分渗透路径和水分的截留部位。但是,所有1型测试车(TV)都可以在PCT运行120小时后幸存。因此,以较低的表面能对FS进行了Ar和O2 等离子体处理,以提高表面能和润湿性。然后,使用ACF成功地去除了刚性基板(RS)-FS粘结处的气泡。

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