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Transversal growth micro structures of quasicrystalline Ti-Zr-Ni films

机译:准晶Ti-Zr-Ni薄膜的横向生长微观结构

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Pulsed laser deposition from a Nd:YAG laser was employed in the production of hundreds of nanometer thick quasicrystalline Ti-Zr-Ni films on glass substrate. The influence of deposition temperature T_s on the structure, morphology and microstructure of the films across their thickness was investigated. The morphology and microstructure features were evaluated by X-ray diffraction and transmission electron microscopy techniques. The low deposition temperatures were found to produce films with nanometer sized grains embedded in an amorphous matrix. The grains exhibit quasicrystalline order. The higher deposition temperatures lead to films whose structure is not uniform all along the growth direction. The layer in contact with the substrate is a very thin amorphous layer. The main part of the film consists of crystallized columns. The columns have grown from a nanocrystallized layer where the size of crystallites increases with increasing thickness.
机译:Nd:YAG激光器的脉冲激光沉积被用于在玻璃基板上生产数百纳米厚的准晶体Ti-Zr-Ni膜。研究了沉积温度T_s对整个膜的结构,形貌和微观结构的影响。通过X射线衍射和透射电子显微镜技术评估了形态和微观结构特征。发现低的沉积温度产生具有嵌入无定形基质中的纳米级晶粒的膜。晶粒表现出准晶序。较高的沉积温度导致膜的结构在整个生长方向上都不均匀。与基材接触的层是非常薄的非晶层。膜的主要部分由结晶柱组成。柱从纳米结晶层生长,其中微晶的尺寸随厚度增加而增加。

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