Organometallic chemical vapor deposition of V-groove InGaAs/GaAs quantum wires incorporated in planar Bragg microcavities

摘要

We report the fabrication and the opitcal propertis of dense arrays of strained InGaAs/GaAs V-groove quantum wires (QWRs) embedded in wavelength size planar Bragg microcavities, made using a two-step organometallic chemical vapor deposition (OMCVD). Growth front evolution and top surface morphology of GaAs on the corrugated substrate were investigated as a function of the growth temperature (550-625 deg C) and the pitch of the V-groove grating (3-0.25 um).