Structural characteization of LPOMVPE grown AlAs/GaAs multilayers

摘要

The characterization of the AlAsGaAs multilayers based on the moeling of the X-rlay scaterin is discussed. The sructural parameters regardign the thickness of the bilayrer components and the verical and laterial variaions (interface roughness) were assessed from low and high angle scan modes. Thu diffuse scattering analysis showed that both lateral and verical correlation of the interace roughness develops in this LPOMVPE grwon system.