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首页> 外文期刊>Journal of Crystal Growth >Optical characterization of (In,Ga)(As,N) thin films grown by molecular beam epitaxy on non-(100) GaAs substrates
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Optical characterization of (In,Ga)(As,N) thin films grown by molecular beam epitaxy on non-(100) GaAs substrates

机译:在非(100)GaAs衬底上通过分子束外延生长的(In,Ga)(As,N)薄膜的光学表征

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摘要

We have used photoreflectance (PR) and photoluminescence (PL) measurements to characterize the optical properties of a series of strained In_xGa_(1-x)As_(1-y)N_y thin films (x~20%, y~3%) grown by molecular beam epitaxy (MBE) on different GaAs substrates with the following surface orientations: (100), (511)A, (411)A, (311)A, and (111)A. The aim of our work is to investigate the effect of substrate orientation on the optical emission of (In, Ga)(As, N). Our results indicate that the growth direction affects the crystal quality, the N incorporation, and the optical properties of the films.
机译:我们使用光反射(PR)和光致发光(PL)测量来表征生长的一系列应变In_xGa_(1-x)As_(1-y)N_y薄膜(x〜20%,y〜3%)的光学特性。通过分子束外延(MBE)在具有以下表面取向的不同GaAs衬底上进行:(100),(511)A,(411)A,(311)A和(111)A。我们的工作目的是研究衬底取向对(In,Ga)(As,N)的光发射的影响。我们的结果表明,生长方向会影响晶体质量,N的掺入和薄膜的光学性能。

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