Microstructural investigation of 3C-SiC islands grown by VLS mechanism on 6H-SiC substrate

摘要

Trying to understand how 3C-SiC polytype could nucleate on a 6H-SiC (0001) surface from a liquid phase, the initial stage of the vapor-liquid-solid (VLS) growth was studied. It was shown that, after a simple contact of the seed with the Ge_(50)Si_(50) mel