Transparent Ga-doped zinc oxide-based window heaters fabricated by pulsed laser deposition

摘要

Ga-doped ZnO (GZO) thin films were prepared on glass substrates via pulsed laser deposition for window heater applications in the automobile industry. The structural, electrical, and optical properties of these films were investigated for their dependencies on Ga_2O_3 content and substrate temperature. GZO films with a resistivity of 2.14 × 10~(-4) Ωcm and transparency above 90% in the visible range were obtained. GZO line heaters were patterned on glass substrates, and they heated rapidly from room temperature to 88.2 ℃ in 48 s at an applied voltage of 12 V. These results demonstrate the possibility of using GZO thin films as effective transparent heaters.