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首页> 外文期刊>Journal of Crystal Growth >Atomic ordering in GaAsSb (001) grown by metalorganic vapor phase epitaxy
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Atomic ordering in GaAsSb (001) grown by metalorganic vapor phase epitaxy

机译:金属有机气相外延生长的GaAsSb(001)中的原子有序化

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摘要

Epitaxial GaAsSb (001) semiconductor alloys grown by metalorganic vapor phase epitaxy exhibit several spontaneously ordered structures. A superlattice structure with three-fold ordering in the [110] direction has been previously observed by different groups. CuAu structures with (100) and (010) ordering planes have also been reported. The physical origin of CuAu ordering in III-V semiconductors has not yet been explained. In this work we report the effect of growth conditions on CuAu ordering in GaAsSb, including miscut from (001), growth rate, bismuth surfactant concentration, and growth temperature. These data point to a surface kinetic mechanism not based on dimer strain, but possibly due to one-dimensional ordering at step edges.
机译:通过金属有机气相外延生长的外延GaAsSb(001)半导体合金表现出几种自发的有序结构。先前已由不同的小组观察到在[110]方向上具有三重有序的超晶格结构。还报道了具有(100)和(010)有序平面的CuAu结构。尚未解释III-V半导体中CuAu有序的物理起源。在这项工作中,我们报告了生长条件对GaAsSb中CuAu有序化的影响,包括(001)的错切,生长速率,铋表面活性剂浓度和生长温度。这些数据指向的表面动力学机制并非基于二聚体应变,而是可能归因于台阶边缘的一维排序。

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