Study of the thermal decomposition of 'captured' intermediates in the CVD of ZnO from DEZ and H_2O by TGA-DTA and quadrupole mass spectroscopy

摘要

The reaction intermediates in the APCVD of ZnO from Diethylzinc (DEZ) and H_2O vapors were obtained at temperatures ranging from 25 to 700 ℃ by using a water-cooled substrate. The thermal decomposition properties of the samples were studied using simultaneous Thermogravimetric analysis and differential thermal analysis (TGA-DTA). A quadrupole mass spectrometer (QMS) was used to identify the gases evolved during thermal decomposition. Changes in the TGA-DTA pattern were observed when the reactor temperature was increased and also during ageing at room temperature. Up to three endothermic peaks were observed with peak temperatures at 80-100 ℃ (peak 1), 115-125 ℃ (peak 2), and 145-155 ℃ (peak 3). QMS analysis detected only water as the volatile component during thermal decomposition. The results were analyzed in combination with the results of our previous studies.