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Surface morphology and Bi incorporation in GaSbBi(As)/GaSb films

机译:GaSbBi(As)/ GaSb薄膜的表面形态和Bi掺入

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Several GaSbBi(As)/GaSb films were grown to investigate the effects of Bi on GaSb surface morphology and bulk composition as a function of growth conditions. Scanning electron microscopy of the surface shows several biphasic droplets consisting of Ga- and Bi-rich phases ≈ 1 μm in diameter form on the surface. Some of these droplets exhibit more unusual features such as facets, sub-droplets, and droplet etching into the underlying film. Bi droplet coverage shows a direct increase with increasing Bi:Ga and Bi:Sb BEP ratios. Rutherford backscatter and X-ray diffraction analyses of these films show Bi concentration of up to 12% and a concurrently increasing unintentional As concentration of up to 9.3%, suggesting the presence of a strain auto-compensation mechanism during film growth. Once Bi concentration reaches 10-12%, Bi incorporation saturates, with excess Bi atoms instead accumulating in the droplets.
机译:生长了数个GaSbBi(As)/ GaSb膜,以研究Bi对GaSb表面形态和体积组成的影响,并与生长条件有关。表面的扫描电子显微镜显示表面上有数个双相液滴,由富含Ga和Bi的相组成,直径约1μm。这些液滴中的一些表现出更不寻常的特征,例如刻面,子液滴以及将液滴蚀刻到下面的膜中。 Bi液滴的覆盖率随Bi:Ga和Bi:Sb BEP比的增加而直接增加。这些薄膜的卢瑟福背散射和X射线衍射分析表明,Bi浓度最高可达12%,同时无意识As浓度最高可达9.3%,这表明在薄膜生长过程中存在应变自动补偿机制。一旦Bi浓度达到10-12%,Bi掺入就会饱和,而多余的Bi原子会累积在液滴中。

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