Effect of hydrolysis on properties of PbZr_0.50Ti_0.50O_3 ferroelectric thin films derived from a modified sol-gel process

摘要

Lead zirconate titanate PbZr_0.50Ti_0.50O_3 (PZT) ferroelectric thin films were successfully depositied on Pt(111) /Ti/ SiO-2Si substrates by a modified sol-gel method using zirconium nitrate as a substitute for the conventional zirconium Alkoxide. The precursor solutions were hydrolyzed with different H_2O/PB ratios. The effect of hydrolysis rations of the Solution on the microstructure for the PZT thin films were investigated via X-ray diffraction 9XRD) and atomic force Microscopy (AFM) techniques.