Secondary electron yield with primary electron beam of kilo‐electron‐volts

摘要

Secondary electron yields δPE due to primary electrons of kilo‐electron‐volts are estimated for various metals by measuring total electron yields δT in an UHV system and using a Monte Carlo calculation to derive δPE from δT. The dependences of δT/δPE as well as δPE on both the atomic number Z and primary energy are also discussed from a theoretical viewpoint based on the Monte Carlo technique for primary energies higher than a few keV and on a simple theory for lower primary energies.