Formulae for secondary electron yield and the ratio of the average number of secondary electrons generated by a single backscattered electron to that generated by a single primary electron

摘要

On the basis of the characteristic of secondary electron emission, the number of secondary electrons (i style="mso-bidi-font-style:normal"?′/isubPE??/sub) released per primary electron entering metals in the incident energy (i style="mso-bidi-font-style:normal"span style="mso-bidi-font-weight:bold"W/span/isubspan style="mso-bidi-font-weight:bold"p0/span/sub) range 10-102 keV and the incident angle span style="mso-bidi-font-weight:bold"(i style="mso-bidi-font-style:normal"??/ispan style="mso-bidi-font-weight:bold") range 0-89span style="font-family:Symbol;mso-ascii-font-family: " times="" new="" roman";mso-hansi-font-family:"times="" roman";mso-char-type:symbol;="" mso-symbol-font-family:symbol"="" lang="EN-GB"?° was deduced. In addition, the number of secondary electrons released per primary electron entering metals at i style="mso-bidi-font-style:normal"??=/ispan style="mso-bidi-font-weight: bold"0 (i style="mso-bidi-font-style:normal"?′/isubPE0/sub)b /bspan style="mso-bidi-font-weight:bold"was obtainedb./b Based on the deduced i style="mso-bidi-font-style:normal"?′/isubPE??/sub, the characteristic of span style="mso-bidi-font-weight:bold"the emission angle distribution of the backscattered electrons and the definition of i style="mso-bidi-font-style:normal"?2/isub??/sub, the relationships among i style="mso-bidi-font-style:normal"?2/isub??/sub,span style="mso-bidi-font-weight: bold" cosi style="mso-bidi-font-style:normal"?? /iand the parameter i style="mso-bidi-font-style:normal"x/i were given, where i style="mso-bidi-font-style: normal"?2/isub??/sub is span style="mso-bidi-font-weight:bold"theb /bratio of the average number of secondary electrons generated by a single backscattered electron to that generated by a single primary electron entering the emitter at i style="mso-bidi-font-style:normal"??/i. Considering the relationship between i style="mso-bidi-font-style:normal"?′/isubPE??/sub and i style="mso-bidi-font-style:normal"?′/isubPE0/subb /bspan style="mso-bidi-font-weight:bold"and theb /brelationship between the secondary electron yields span style="mso-bidi-font-weight:bold"at i style="mso-bidi-font-style:normal"W/isubp0/sub=10-102 keV and i style="mso-bidi-font-style:normal"span style="mso-bidi-font-weight:bold"??=/span/i0-89span style="font-family:Symbol;mso-ascii-font-family:" times="" new="" roman";="" mso-hansi-font-family:"times="" roman";mso-char-type:symbol;mso-symbol-font-family:="" symbol"="" lang="EN-GB"?°i style="mso-bidi-font-style:normal" /i(i style="mso-bidi-font-style:normal"?′/isub??/sub)b /bspan style="mso-bidi-font-weight:bold"and the secon