Thermophysical and electrical properties of Al-doped ZnO films

摘要

Thermal diffusivity of Al-doped ZnO (AZO) films with a thickness of 200 nm was quantitatively analyzed using a “rear heating/front detection type” nanosecond thermoreflectance system. AZO monolayer and Mo/AZO/Mo three-layered films were prepared on synthesized silica substrates by DC magnetron sputtering using high density ceramic ZnO–Al2O3 (Al2O3: 2.5 wt. %) and Mo metal targets. The thermal diffusivity and electrical resistivity of the deposited AZO films ranged 1.8 × 10-6 –2.4 × 10-6 m2 s-1 and 2.3 × 10-3–5.9 × 10-4 Ω cm, respectively. The thermal conductivity corresponding to the thermal diffusivity was one order of magnitude smaller than that of sintered AZO ceramics prepared from ZnO and Al2O3 powders. However, it was found to be larger than that of In2O3-based transparent conductive oxide (TCO) films with approximately the same electrical conductivity, thus implying that AZO can be considered an excellent material for diathermanous TCO circuits.