Simulation and analysis of grating-integrated quantum dot infrared detectors for spectral response control and performance enhancement

摘要

We propose and analyze a novel detector structure for pixel-level multispectral infrared imaging. More specifically, we investigate the device performance of a grating-integrated quantum dots-in-a-well photodetector under backside illumination. Our design uses 1-dimensional grating patterns fabricated directly on a semiconductor contact layer and, thus, adds a minimal amount of additional effort to conventional detector fabrication flows. We show that we can gain wide-range control of spectral response as well as large overall detection enhancement by adjusting grating parameters. For small grating periods, the spectral responsivity gradually changes with parameters. We explain this spectral tuning using the Fabry–Perot resonance and effective medium theory. For larger grating periods, the responsivity spectra get complicated due to increased diffraction into the active region, but we find that we can obtain large enhancement of the overall detector performance. In our design, the spectral tuning range can be larger than 1 μm, and, compared to the unpatterned detector, the detection enhancement can be greater than 92% and 148% for parallel and perpendicular polarizations. Our work can pave the way for practical, easy-to-fabricate detectors, which are highly useful for many infrared imaging applications.