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Effect of ambient air pressure on debris redeposition during laser ablation of glass

机译:玻璃激光烧蚀过程中环境气压对碎屑再沉积的影响

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The effect of ambient air pressure on the redeposition of debris, ablated from the zinc borosilicate glass target using 6 ns, 266 nm laser pulses, has been studied for incident fluences of 3-18 J/cm~2. Measurements were carried out in air at pressures ranging from 10-750 Torr. Scanning electron microscopy and optical microscope observations of the target surface were made to analyze the morphology of the redeposited debris. It was found that for higher values of the laser fluence and ambient pressure, the target surface is extremely rough, with large pieces of molten glass and debris fragments deposited near and around the ablation site. The profile of the redeposited debris also shows signs of a strong shock-wave-cleaning effect and possibly a Rayleigh-Taylor instability at higher pressures. Contrary to this, under low-pressure environment the surface of the redeposited debris is cleaner and smoother, with minimal damage around the ablated crater. The measured radius of the debris field was found to be proportional to the inverse cube root of the ambient pressure, consistent with the stagnation distance of the expansion plume when energy balance with the displaced air is considered. In addition to this, the mass of the redeposited debris was estimated from the measured optical thickness of the film and compared to the ablated mass. In the range below 100 Torr, both the mass of the redeposited debris and the percentage of the ablated mass which was redeposited were found to increase with the increasing fluence and the ambient air pressure.
机译:研究了环境气压对使用6 ns,266 nm激光脉冲从硼硅酸锌玻璃靶上烧掉的碎片再沉积的影响,其入射通量为3-18 J / cm〜2。测量是在空气中在10-750托的压力下进行的。进行了靶表面的扫描电子显微镜和光学显微镜观察,以分析再沉积碎片的形态。已经发现,对于更高的激光通量和环境压力值,目标表面极其粗糙,在消融部位附近和周围沉积有大块熔融玻璃和碎屑。再沉积的碎片的轮廓还显示出强烈的冲击波清洁效果,并可能在较高压力下出现瑞利-泰勒不稳定性的迹象。与此相反,在低压环境下,再沉积的碎片表面更清洁,更光滑,烧蚀的火山口周围的损坏最小。发现碎片场的测量半径与环境压力的倒立方根成正比,与考虑到与置换空气的能量平衡时膨胀羽流的停滞距离一致。除此之外,根据测得的薄膜光学厚度估算再沉积碎片的质量,并将其与烧蚀质量进行比较。在低于100托的范围内,发现重新沉积的碎片的质量和重新沉积的烧蚀的质量的百分比都随着通量和环境气压的增加而增加。

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