Femtosecond Laser Micromachining of Soda–Lime Glass in Ambient Air and under Various Aqueous Solutions

摘要

We have studied femtosecond ablation of soda–lime glass sample under thin water film, under KOH and NaCl aqueous solutions films and their influence and benefits compared with ablation in the air atmosphere. These have been studied in case of the groove ablation using the infrared (IR) femtosecond laser. KOH aqueous solution film above the glass sample improved the ablation efficiency and led to the formation of the grooves with a higher aspect ratio when multi-scan glass cutting conditions were applied.