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A study on the reliability of indium solder die bonding of high power semiconductor lasers

机译:大功率半导体激光器铟焊料芯片键合的可靠性研究

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High power semiconductor lasers have found increased applications. Indium solder is one of the most widely used solders in high power laser die bonding. Indium solder has some advantages in laser die bonding. It also has some concerns, however, especially in terms of reliability. In this paper, the reliability of indium solder die bonding of high power broad area semiconductor lasers was studied. It was found that indium solder bonded lasers have much shorter lifetime than AuSn solder bonded devices. Catastrophic degradation was observed in indium solder bonded lasers. Nondestructive optical and acoustic microscopy was conducted during the lifetime testing to monitor the failure process and destructive failure analysis was performed after the lasers failed. It was found that the sudden failure was caused by electromigration of indium solder at the high testing current of up to 7 A. It was shown that voids were created and gradually enlarged by indium solder electromigration, which caused local heating near the facets of the laser. The local heating induced catastrophic optical mirror damage (COMD) of the lasers. It was discussed that current crowding, localized high temperature, and large temperature gradient contributed to the fast indium solder electromigration. It was observed that some bright pattern structures appeared on the front facet of the indium solder bonded lasers after the devices failed and the bright patterns grew and spread upon further testing. Failure analysis showed that the bright pattern structure apparent on the front facet was due to crystallization of the TiO_x material of the front facet coating as a result of overheating during lifetime testing. It was concluded that indium solder is not suitable for high power laser applications due to electromigration at high current densities and high temperatures.
机译:高功率半导体激光器已经发现了越来越多的应用。铟焊料是高功率激光管芯键合中使用最广泛的焊料之一。铟焊料在激光管芯键合中具有一些优势。但是,它也有一些问题,特别是在可靠性方面。本文研究了大功率广域半导体激光器中铟焊料芯片键合的可靠性。已经发现,铟焊料键合激光器的寿命比AuSn焊料键合器件的寿命短得多。在铟焊料键合激光器中观察到灾难性的降解。在寿命测试过程中进行了非破坏性光学和声学显微镜,以监测故障过程,并在激光器故障之后进行破坏性故障分析。发现突然的故障是由于铟焊料在高达7 A的高测试电流下的电迁移引起的。结果表明,由于铟焊料的电迁移会产生空隙并逐渐扩大空隙,这会导致激光器端面附近的局部发热。 。局部加热会引起激光器的灾难性光学镜损坏(COMD)。讨论了电流拥挤,局部高温和较大的温度梯度导致铟焊料快速电迁移。观察到,在器件失效后,一些亮图案结构出现在铟焊料键合激光器的正面,并且亮图案在进一步测试后逐渐生长并扩散。失效分析表明,在正面上可见的明亮图案结构是由于寿命测试期间过热导致正面涂层的TiO_x材料结晶所致。结论是,由于在高电流密度和高温下的电迁移,铟焊料不适合大功率激光应用。

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