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首页> 外文期刊>Journal of Applied Physics >Enhancement In Sensitivity Of Copper Sulfide Thin Film Ammonia Gas Sensor: Effect Of Swift Heavy Ion Irradiation
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Enhancement In Sensitivity Of Copper Sulfide Thin Film Ammonia Gas Sensor: Effect Of Swift Heavy Ion Irradiation

机译:硫化铜薄膜氨气传感器灵敏度的增强:快速重离子辐照的影响

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摘要

The studies are carried out on the effect of swift heavy ion (SHI) irradiation on surface morphology and electrical properties of copper sulfide (Cu_xS) thin films with three different chemical compositions (x values). The irradiation experiments have been carried out on Cu_xS films with x = 1.4, 1.8, and 2 by 100 MeV gold heavy ions at room temperature. These as-deposited and irradiated thin films have been used to detect ammonia gas at room temperature (300 K). The SHI irradiation treatment on x=1.4 and 1.8 copper sulfide films enhances the sensitivity of the gas sensor. The results are discussed considering high electronic energy deposition by 100 MeV gold heavy ions in a matrix of copper sulfide.
机译:进行了快速重离子(SHI)辐照对具有三种不同化学成分(x值)的硫化铜(Cu_xS)薄膜的表面形态和电性能的影响的研究。在室温下,对x = 1.4、1.8和2 x 100 MeV金重离子的Cu_xS膜进行了辐照实验。这些沉积和辐照的薄膜已用于检测室温(300 K)下的氨气。在x = 1.4和1.8的硫化铜膜上进行SHI辐照处理可以增强气体传感器的灵敏度。考虑到100 MeV金重离子在硫化铜基质中的高电子能量沉积,讨论了结果。

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