Millimeter wave power sensing using micro- and nanoelectromechanical systems

摘要

This paper deals with the sensing of millimeter and submillimeter wave power using self-actuation of micro- and nano electromechanical systems at certain power thresholds. Since the Sensing element and the device to be measured are integrated on the same substrate and fabricated in the same way, a very high degree of miniaturization and accuracy is achieved.