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首页> 外文期刊>Journal of Applied Physics >Damage of multilayer optics with varying capping layers induced by focused extreme ultraviolet beam
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Damage of multilayer optics with varying capping layers induced by focused extreme ultraviolet beam

机译：聚焦紫外光束对覆盖层变化的多层光学器件的损坏

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摘要

Extreme ultraviolet Mo/Si multilayers protected by capping layers of different materials were exposed to 13.5 nm plasma source radiation generated with a table-top laser to study the irradiation damage mechanism. Morphology of single-shot damaged areas has been analyzed by means of atomic force microscopy. Threshold fluences were evaluated for each type of sample in order to determine the capability of the capping layer to protect the structure underneath.
机译：将由不同材料的覆盖层保护的极紫外Mo / Si多层膜暴露于台式激光产生的13.5 nm等离子体源辐射下，以研究辐射损伤的机理。单发损伤区域的形态已经通过原子力显微镜进行了分析。对每种样品的阈值通量进行了评估，以确定覆盖层保护下方结构的能力。

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  • 来源
    《Journal of Applied Physics》 |2013年第20期|203106.1-203106.6|共6页
  • 作者

    Alain Jody Corso; Paola Zuppella; Frank Barkusky; Klaus Mann; Matthias Mueller; Piergiorgio Nicolosi; Marco Nardello; Maria Guglielmina Pelizzo;

  • 作者单位

    National Research Council of Italy, Institute for Photonics and Nanotechnology, via Trasea 7,35131 Padova, Italy,Department of Information Engineering, University of Padova, via Gradenigo 6/B, 35131 Padova, Italy;

    National Research Council of Italy, Institute for Photonics and Nanotechnology, via Trasea 7,35131 Padova, Italy;

    Laser-Laboratorium Goettingen e.V, Goettingen, Germany,KLA-Tencor, 5 Technology Dr., Milpitas, California 95035, USA;

    Laser-Laboratorium Goetingen e.V, Goetingen, Germany;

    Laser-Laboratorium Goetingen e.V, Goetingen, Germany;

    National Research Council of Italy, Institute for Photonics and Nanotechnology, via Trasea 7,35131 Padova, Italy,Department of Information Engineering, University of Padova, via Gradenigo 6/B, 35131 Padova, Italy;

    National Research Council of Italy, Institute for Photonics and Nanotechnology, via Trasea 7,35131 Padova, Italy,Department of Information Engineering, University of Padova, via Gradenigo 6/B, 35131 Padova, Italy;

    National Research Council of Italy, Institute for Photonics and Nanotechnology, via Trasea 7,35131 Padova, Italy,Department of Information Engineering, University of Padova, via Gradenigo 6/B, 35131 Padova, Italy;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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