Penetrative imaging of sub-surface microstructures with a near-field microwave microscope

摘要

Microwaves have the capability of penetrating through materials with low permittivity. By means of a near-field scanning microwave microscope system, we obtained two-dimensional maps of the incident microwave's reflection coefficient intensity and frequency shift, which correspond well to the spatial distribution and electrical conductance of fluids and metallic thin film structures hidden underneath 15-170 μm thick dielectric covers. The lateral resolution and sensitivity to conductivity for the target samples were found closely related to the thickness of the cover layer. The technique offers a real-time, in-situ, and a non-invasive approach to monitor the local chemical reactions, the motion of fluids, and the distribution or concentrations of ions or bio-materials in lab-on-a-chip systems. This technique also has the potential to be developed for the detection of live cells and tissues.