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Highly conductive indium nanowires deposited on silicon by dip-pen nanolithography

机译:通过浸笔式纳米光刻技术在硅上沉积的高导电铟纳米线

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摘要

In this paper, we developed a new dip-pen nanolithography (DPN) method. Using this method, we fabricated conductive nanowires with diameters of 30-50 nm on silicon substrates. To accomplish this, indium was transferred from an atomic force microscopy tip to the surface by applying a potential difference between the tip and substrate. The fabricated indium nanowires were several micrometers in length. Unlike thermal DPN, our DPN method hardly oxidized the indium, producing nanowires with conductivities from 5.7 × 10~(-3) to 4 × 10~(-2) Ω cm.
机译:在本文中,我们开发了一种新的浸笔式纳米光刻(DPN)方法。使用这种方法,我们在硅基板上制造了直径为30-50 nm的导电纳米线。为此,通过在尖端和基板之间施加电势差,将铟从原子力显微镜尖端转移到表面。制成的铟纳米线的长度为几微米。与热DPN不同,我们的DPN方法几乎不会氧化铟,从而生产出电导率为5.7×10〜(-3)到4×10〜(-2)Ωcm的纳米线。

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  • 来源
    《Journal of Applied Physics》 |2015年第14期|145305.1-145305.4|共4页
  • 作者单位

    Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk 630090, Russia,Novosibirsk State University, Novosibirsk 630090, Russia;

    Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk 630090, Russia;

    Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk 630090, Russia;

    Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk 630090, Russia,Novosibirsk State University, Novosibirsk 630090, Russia;

    Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk 630090, Russia;

    Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk 630090, Russia;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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