Controlling the microwave characteristic of FeCoB-ZnO granular thin films deposited by obliquely sputtering

摘要

A series of FeCoB-ZnO soft magnetic granular films deposited at different oblique angles were prepared by magnetron sputtering system. A variable in-plane uniaxial magnetic anisotropy field from 27.6 Oe to 212 Oe and an adjustable ferromagnetic resonance frequency from 1.89 GHz to 5.3 GHz were obtained in the as-deposited films just by increasing the oblique angle from 15° to 56°. Frequency line-width and effective Gilbert damping factor were both insensitive to the different oblique angles (x_(eff) decreased from 0.036 to 0.03 and A/ decreased from 1.49 to 1.27), which almost satisfied the requirement that f_(FMR) could be tuned independently in a certain frequency range. Besides, the change of dynamic magnetic anisotropy field versus oblique angle was illustrated and analyzed quantitatively compared with the static magnetic anisotropy.