Effects of thickness ratio of InGaN to GaN in superlattice strain relief layer on the optoelectrical properties of InGaN-based green LEDs grown on Si substrates

摘要

InGaN-based multiple quantum well (MQW) green light-emitting diodes with a InGaN/GaN superlattice as a strain relief layer (SSRL) were grown on Si(111) substrates by metal organic chemical vapor deposition. The influences of the thickness ratio of InGaN to GaN in SSRL on the optoelectrical properties have been investigated. Electrical measurements show that the sample with a higher thickness ratio has a lower series resistance. This is mainly ascribed to the improvement of carrier vertical transport due to the thinner GaN in SSRL. However, it is found that the leakage current increases with the thickness ratio from 1:1 to 2.5:1, which could be attributed to the larger density of small size V-pits forming at the first few QW pairs. Compared with the smaller thickness ratio, the sample with a higher thickness ratio of InGaN to GaN in SSRL is found to exhibit larger strain relaxation (about 33.7%), but the electroluminescence measurement exhibits inferior emission efficiency. Carrier leakage via the small V-pits and the rougher interface of MQW are believed to be responsible for the reduction of emission efficiency.