Seed layer impact on structural and magnetic properties of [Co/Ni] multilayers with perpendicular magnetic anisotropy

摘要

[Co/Ni] multilayers with perpendicular magnetic anisotropy (PMA) have been researched and applied in various spintronic applications. Typically, the seed layer material is studied to provide the desired face-centered cubic (fcc) texture to the [Co/Ni] to obtain PMA. The integration of [Co/ Ni] in back-end-of-line processes also requires the PMA to survive post-annealing. In this paper, the impact of NiCr, Pt, Ru, and Ta seed layers on the structural and magnetic properties of [Co(0.3nm)/Ni(0.6nm)] multilayers is investigated before and after annealing. The multilayers were deposited in-situ on different seeds via physical vapor deposition at room temperature. The as-deposited [Co/Ni] films show the required fcc(111) texture on all seeds, but PMA is only observed on Pt and Ru. In-plane magnetic anisotropy is obtained on NiCr and Ta seeds, which is attributed to strain-induced PMA loss. PMA is maintained on all seeds after post-annealing up to 400℃. The largest effective perpendicular anisotropy energy (K_U~(eff) ≈ 2 × 10~5 J/m~3) after annealing is achieved on the NiCr seed. The evolution of PMA upon annealing cannot be explained by further crystallization during annealing or strain-induced PMA, nor can the observed magnetization loss and the increased damping after annealing. Here, we identify the diffusion of the non-magnetic materials from the seed into [Co/Ni] as the major driver of the changes in the magnetic properties. By selecting the seed and post-annealing temperature, the [Co/Ni] can be tuned in a broad range for both PMA and damping.