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首页> 外文期刊>Journal of Applied Physics >Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes
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Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes

机译:原子层沉积的多GaN / c-Si异质结二极管中的电荷载流子传输和电致发光

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In this work, we study the charge carrier transport and electroluminescence (EL) in thin-film polycrystalline (poly-) GaN/c-Si heterojunction diodes realized using a plasma enhanced atomic layer deposition process. The fabricated poly-GaN/p-Si diode with a native oxide at the interface showed a rectifying behavior (I-on/I-off ratio similar to 10(3) at +/- 3 V) with current-voltage characteristics reaching an ideality factor n of similar to 5.17, The areal (J(a)) and peripheral (J(p)) components of the current density were extracted, and their temperature dependencies were studied. The space charge limited current (SCLC) in the presence of traps is identified as the dominant carrier transport mechanism for J(a) in forward bias. An effective trap density of 4.6 x 10(17)/cm(3) at a trap energy level of 0.13 eV below the GaN conduction hand minimum was estimated by analyzing J(a). Other basic electrical properties of the material such as the free carrier concentration, effective density of states in the conduction band, electron mobility, and dielectric relaxation time were also determined from the current-voltage analysis in the SCLC regime. Further, infrared EL corresponding to the Si bandgap was observed from the fabricated diodes. The observed EL intensity from the GaN/p-Si heterojunction diode is similar to 3 orders of magnitude higher as compared to the conventional Si only counterpart. The enhanced infrared light emission is attributed to the improved injector efficiency of the GaN/Si diode because of the wide bandgap of the poly-GaN layer and the resulting hand discontinuity at the GaN/Si interface. Published by AIP Publishing.
机译:在这项工作中,我们研究了使用等离子体增强原子层沉积工艺实现的薄膜多晶(poly)GaN / c-Si异质结二极管中的电荷载流子传输和电致发光(EL)。所制造的在界面处具有天然氧化物的聚GaN / p-Si二极管显示出整流行为(I-on / I-off比在+/- 3 V时类似于10(3)),电流-电压特性达到理想因子n类似于5.17,提取电流密度的面积(J(a))和外围(J(p))分量,并研究它们的温度依赖性。存在陷阱的空间电荷限制电流(SCLC)被确定为正向偏置下J(a)的主要载流子传输机制。通过分析J(a),在低于GaN导针最小值的0.13 eV的陷阱能级下,有效陷阱密度为4.6 x 10(17)/ cm(3)。材料的其他基本电学性质,例如自由载流子浓度,导带中态的有效密度,电子迁移率和介电弛豫时间,也由SCLC方案中的电流-电压分析确定。此外,从制造的二极管观察到对应于Si带隙的红外EL。从GaN / p-Si异质结二极管观察到的EL强度与常规的仅Si对应物相比大约高3个数量级。红外光发射的增强归因于GaN / Si二极管的注入器效率提高,这是由于聚GaN层的宽带隙以及在GaN / Si界面处产生的手不连续性所致。由AIP Publishing发布。

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