Piezoelectric Properties of Ink-Jet-Printed Lead Zirconate Titanate Thick Films Confirmed by Piezoresponse Force Microscopy

摘要

An ink consisting of Pb(Zr_(0.53)Ti_(0.47))O_3 (PZT) particles with a median size of 170 nm and a narrow size distribution, in a dispersion of water and glycerol, and with a low viscosity and surface tension, was used for the fabrication of thick films by piezoelectric ink-jet printing. This study reports the printing conditions, the subsequent thermal treatment of the as-deposited layers, and the properties of the sintered PZT thick film. The film, sintered at 1100℃, had a locally dense microstruc-ture and consisted of grains that are a few 100 nm across, as revealed by scanning electron microscopy. A local piezoelectric response of 15 pm/V was measured in the ink-jet-printed PZT thick film by piezoresponse force microscopy.