Study of local piezoelectric properties for europium doped lead zirconate titanate films by piezoresponse force microscope

摘要

Using a sol-gel method, rare earth element europium (Eu) doped lead zirconate titanate (Pb0.925Eu0.05(Zr0.52Ti 0.48)O3, denoted as PEZT) films were obtained. A novel method was proposed to measure the PEZT film's local piezoelectric properties by piezoresponse force microscope tip utilizing wire bonding through which external electric field was applied. Relative piezoelectric coefficient ("d33") and the strain behavior (butterfly loop) of the PEZT films described as the function of electric field were obtained by using this method. The oscillation amplitude against the ac voltage curve is linear, revealing a slope of 3.78 × 10-5 V/V, and the coercive field estimated from the butterfly loop has a mean value of 27.5 kV/cm. The butterfly loops obtained from different places can be used to describe the transfer and attenuation of the domain vibration in PEZT films.