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Threshold voltage shift-proof circular oxide thin film transistor with top and bottom gates for high bending stability

机译:具有高弯曲稳定性的顶部和底部栅极的阈值电压偏移圆形氧化膜晶体管

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摘要

Negligible threshold-voltage shift is reported for oxide thin-film transistors (TFTs) under high current (3 mu A) and tensile bending stress (2 mm radius). The good stability is attributed to a circular TFT structure with electrically shorted top and bottom gates, and a polyimide substrate embedded with carbon-nanotubes for mechanical support and damage-free detachment from carrier glass. The circular structure leads to uniform electric field distribution across the channel, hard saturation in output characteristics, independence from tensile bending direction-related degradation, as well as isolation of the channel from stress concentrated points, which arise from local electric-field crowding at sharp corners or channel edges. The double-gate topology increases gate-drivability and achieves volume-accumulation, which minimizes the influence of defects at the channel surface and slight variations in carrier concentration during stress. Furthermore, the presence of two gates slightly shifts the location of the neutral bending plane towards the oxide semiconductor, thereby significantly reducing strain.
机译:在高电流(3μA)和拉伸弯曲应力(2mm半径)下,报告可忽略不计的阈值 - 电压移位用于氧化物薄膜晶体管(TFT)和拉伸弯曲应力(2mm半径)。良好的稳定性归因于具有电短路和底部栅极的圆形TFT结构,以及嵌入具有碳纳米管的聚酰亚胺衬底,用于从载体玻璃的机械支撑和无损坏的脱离。圆形结构导致跨越通道的均匀电场分布,输出特性的硬饱和度,独立于拉伸弯曲方向相关的劣化,以及从应力集中点的沟道隔离,从而从夏普的局部电场拥挤产生角落或沟道边缘。双栅极拓扑增加栅极 - 驱动性并实现体积累积,这最小化了沟道表面处的缺陷的影响以及应力期间载流子浓度的微小变化。此外,两个门的存在略微将中性弯曲平面的位置朝向氧化物半导体移位,从而显着减少了应变。

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