Fabrication of Slider-Type Near-Field Arrayed Probe for Optical Data Storage

摘要

A near-field optical slider has been prepared for a high-density recording system. The slider includes an array of high-throughput near-field probes and the surface-air bearing of the slider has been designed for a flying height of 20 nm. We have developed a prior-etching process for hollowing out the silicon oxide near-field optical tips. Bottom silicon underneath the arrayed tips and the inner silicon of the tips have been successfully removed for the optical path of visible light.