Plasma Synthesis of Light Emitting Gallium Nitride Nanoparticles Using a Novel Microwave-Resonant Cavity

摘要

Gallium nitride (GaN) based light-emitting nanoparticles were synthesized by microwave plasma chemical vapor synthesis under slightly reduced pressure condition. A novel 2.45 GHz microwave resonant cavity was developed that facilitated the ignition and stable operation. The cavity was designed with the aid of electromagnetic field simulations to match the microwaves in the transverse magnetic (TM) 010-like mode before plasma ignition and in a transverse electromagnetic (TEM)-like mode after plasma ignition. The produced nanoparticles were amorphous and emitted light at the same wavelength as bulk gallium nitride.