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首页> 外文期刊>Japanese journal of applied physics >Wavefront Control System for Phase Compensation in Hard X-ray Optics
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Wavefront Control System for Phase Compensation in Hard X-ray Optics

机译：硬X射线光学系统中用于相位补偿的波前控制系统

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摘要

A highly precise adaptive optical system that can be used in the hard X-ray region was developed. To achieve highly precise control of the wavefront shape, we discussed an optical system with a bendable mirror of deformation accuracy better than 0.4 nm RMS. Using the system, we demonstrated the controllability of the wavefront of a 15nm hard X-ray nanobeam. The intensity profile of the wavefront-modified beam was in good agreement with the wave-optically calculated profile.
机译：开发了可以在硬X射线区域中使用的高精度自适应光学系统。为了实现对波前形状的高精度控制，我们讨论了一种光学系统，该光学系统的可弯曲反射镜的变形精度优于0.4 nm RMS。使用该系统，我们演示了15nm硬X射线纳米束的波前的可控性。波前修正光束的强度分布与波光学计算的分布非常吻合。

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  • 来源
    《Japanese journal of applied physics》 |2009年第7issue1期|072503.1-072503.4|共4页
  • 作者

    Takashi Kimura; Soichiro Handa; Hidekazu Mimura; Hirokatsu Yumoto; Daisuke Yamakawa; Satoshi Matsuyama; Kouji Inagaki; Yasuhisa Sano; Kenji Tamasaku; Yoshinori Nishino; Makina Yabashi; Tetsuya Ishikawa; Kazuto Yamauchi;

  • 作者单位

    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

    SPring-8/Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Koto, Sayo, Hyogo 679-5198, Japan;

    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

    SPring-8/RIKEN, 1-1-1 Koto, Sayo, Hyogo 679-5198, Japan;

    SPring-8/RIKEN, 1-1-1 Koto, Sayo, Hyogo 679-5198, Japan;

    SPring-8/Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Koto, Sayo, Hyogo 679-5198, Japan;

    SPring-8/Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Koto, Sayo, Hyogo 679-5198, Japan SPring-8/RIKEN, 1-1-1 Koto, Sayo, Hyogo 679-5198, Japan;

    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan Center for Ultra Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

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