Study of Strain Induction for Metal-Oxide-Semiconductor Field-Effect Transistors using Transparent Dummy Gates and Stress Liners

摘要

Strain induction was studied on a sample that had a dummy gate tetraethyl orthosilicate-silicon dioxide (TEOS-SiO_2) and SiN film by UV-Raman spectroscopy with high spatial and high wave-number resolution. The UV laser penetrated through the dummy gate that was transparent to UV light, which enabled us to evaluate strain in the channel of the metal-oxide-semiconductor field-effect transistor (MOSFET) model. Furthermore, we compared stress profiles obtained by finite element (FE) calculations with those obtained by UV-Raman measurements. There was a difference between the stress profiles in the line-and-space pattern sample and in the dummy-gate sample; large compressive (tensile) strains were concentrated at the channel edges in the dummy-gate sample with the compressive (tensile) stress liner, although both tensile and compressive strains existed at the channel edge in the line-and-space pattern sample. The results from UV-Raman spectroscopy were consistent with those obtained by the FE calculation.