Near-Edge X-ray Absorption Fine-Structure Spectroscopic Study on Nitrogen-Doped Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films Prepared by Pulsed Laser Deposition

摘要

Nitrogen-doped ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) composite films, which possessed n-type conduction with enhanced electrical conductivity, were prepared by pulsed laser deposition. The film doped with a nitrogen content of 7.9 at. % possessed enhanced electrical conductivity of 18Ω~-1cm~-1 at 300 K. The near-edge X-ray absorption fine-structure (NEXAFS) measurement indicated the appearance of additional peaks due to π* C=N, σ* C=N, and σ* C-N bonds compared with the spectra of undoped films. The sp~2 bonding fraction estimated from the NEXAFS spectra increased with the nitrogen content. The enhanced electrical conductivity is probably due to the formation of additional π* and σ* states and the enhancement in the sp~2 bonding fraction.