Morphological and Structural Changes in Cu(ln,Ga)Se_2 Thin Films by Selenization Using Diethylselenide

摘要

The morphological and structural changes in Cu(ln,Ga)Se_2 (CIGS) thin films during selenization using diethylselenide (DESe) are investigated. The surface morphology and extra phase existence of CIGS thin films strongly depend on the heating profile temperature and time of each step during selenization. Conventional high-temperature (515℃) selenized CIGS thin films formed grains of approximately 2-3 μm, although the Cu-In-Ga metallic precursor was very smooth. On the other hand, the precursor selenized at a low temperature (about 400℃) exhibited a homogeneous surface morphology because the precursor was formed from Cu-Se and (In.Ga)-Se alloys to diffuse selenide into a Cu-In-Ga metallic precursor. The high-temperature selenized CIGS thin films after low-temperature selenization had a homogeneous surface morphology with appropriate-sized grains. These results indicate that the heating profile "during" selenization was very important in forming Cu-Se and (ln,Ga)-Se alloys from a Cu-ln-Ga metallic precursor.