Green Fluorescence of Mn-Doped Zn_2SiO_4 Thin Film Enhanced by Surface Plasmon of Nano-Silver Coating

摘要

One thin film of Mn-doped ZnO was deposited on a quartz glass in a sputtering system where RF magnetron and DC were employed as power sources. The specimen was removed and annealed in an atmospheric furnace at 1200℃ for 2h. This annealed specimen was identified as Mn-doped Zn_2SiO_4 (MZS) crystal. The sample was sputtered to coat it with one Ag film varying in thickness (i.e., 3, 5, and 10nm), and subjected to rapid thermal annealing (RTA) at 500℃ for 15min. The post-RTA-treated specimens were denoted as 3 Ag(MZS)R, 5 Ag(MZS)R, and 10 Ag(MZS)R, and their surfaces revealed a homogenous distribution of silver nanoparticles. Photoluminescence (PL) measurement showed a fluorescence of 530 nm (green light) emitted from MZS. A coating of Ag particles on MZS tended to increase the PL intensity in the following order: 10 Ag(MZS)R (29%) < 5 Ag(MZS)R (72%) < 3 Ag(MZS)R (100%).